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Exploration of rare earth materials for future interpoly dielectric replacement in Flash memory devices
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Authors
Wellekens, Dirk
;
Van Elshocht, Sven
;
Adelmann, Christoph
;
Meersschaut, Johan
;
Swerts, Johan
;
Kittl, Jorge
;
Cacciato, Antonio
;
Debusschere, Ingrid
;
Jurczak, Gosia
;
Van Houdt, Jan
Conference
IEEE International Memory Workshop - IMW
Title
Exploration of rare earth materials for future interpoly dielectric replacement in Flash memory devices
Publication type
Proceedings paper
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