Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Exploration of rare earth materials for future interpoly dielectric replacement in Flash memory devices
Publication:
Exploration of rare earth materials for future interpoly dielectric replacement in Flash memory devices
Date
2010
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wellekens, Dirk
;
Van Elshocht, Sven
;
Adelmann, Christoph
;
Meersschaut, Johan
;
Swerts, Johan
;
Kittl, Jorge
;
Cacciato, Antonio
;
Debusschere, Ingrid
;
Jurczak, Gosia
;
Van Houdt, Jan
Journal
Abstract
Description
Metrics
Views
1978
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations
Metrics
Views
1978
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations