Publication:

Exploration of rare earth materials for future interpoly dielectric replacement in Flash memory devices

Date

2010
Proceedings Paper
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dc.contributor.authorWellekens, Dirk
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorSwerts, Johan
dc.contributor.authorKittl, Jorge
dc.contributor.authorCacciato, Antonio
dc.contributor.authorDebusschere, Ingrid
dc.contributor.authorJurczak, Gosia
dc.contributor.authorVan Houdt, Jan
dc.contributor.imecauthorWellekens, Dirk
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.accessioned2021-10-19T00:22:57Z
dc.date.available2021-10-19T00:22:57Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18344
dc.source.beginpage130
dc.source.conferenceIEEE International Memory Workshop - IMW
dc.source.conferencedate16/05/2010
dc.source.conferencelocationSeoul Korea
dc.source.endpage133
dc.title

Exploration of rare earth materials for future interpoly dielectric replacement in Flash memory devices

dc.typeProceedings paper
dspace.entity.typePublication
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