Multiple patterning...various keys for scaling

Thumbnail
View/open
Metadata
Show full item record
Authors
Wiaux, Vincent; Wong, Patrick; Vandenbroeck, Nadia; Bekaert, Joost; Laenens, Bart; De Bisschop, Peter; Versluijs, Janko; Vandenberghe, Geert
Conference
LLithography Workshop
Title
Multiple patterning...various keys for scaling
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections