Three litho-process-litho approaches for 2D double patterning at the 32nm half pitch node

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Authors

Wong, Patrick; Gronheid, Roel; Wiaux, Vincent; Vaglio Pret, Alessandro; Verhaegen, Staf; Vandenbroeck, Nadia

ISSN

0914-9244

Issue

2

Journal

Journal of Photopolymer Science and Technology

Volume

23

Title

Three litho-process-litho approaches for 2D double patterning at the 32nm half pitch node

Publication type

Journal article

Embargo date

9999-12-31

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