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Litho-process-litho for 2D 32nm hp LOGIC and DRAM double patterning
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Authors
Wong, Patrick
;
Wiaux, Vincent
;
Verhaegen, Staf
;
Vandenbroeck, Nadia
Conference
Optical Microlithography XXIII
Title
Litho-process-litho for 2D 32nm hp LOGIC and DRAM double patterning
Publication type
Proceedings paper
Embargo date
9999-12-31
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