Authors

Xie, Qi; Deduytsche, Davy; Schaekers, Marc; Caymax, Matty; Delabie, Annelies; Qu, Xin-Ping; Detavernier, Christophe

ISSN

0003-6951

Issue

11

Journal

Applied Physics Letters

Volume

97

Title

Implementing TiO2 as gate dielectric for Ge-channel complementary metal-oxide-semiconductor devices by using HfO2/GeO2 interlayer

Publication type

Journal article

Embargo date

9999-12-31