Authors

Zhao, Larry; Baklanov, Mikhaïl; Pantouvaki, Marianna; Tokei, Zsolt; Beyer, Gerald

Conference

218th ECS meeting, Symposium E9: Processing, Materials, and Integration of Damscene and 3D Interconnects

Title

Ultra low-k materials: challenges of scaling

Publication type

Meeting abstract

Embargo date

9999-12-31