Authors

Aarts, Arno; Srivannavit, O; Wise, K.D.; Yoon, E.; Puers, Bob; Van Hoof, Chris; Pereira Neves, Hercules

ISSN

0960-1317

Issue

7

Journal

Journal of Micromechanics and Microengineering

Volume

21

Title

Fabrication technique of a compressible biocompatible interconnect using a thin film transfer process

Publication type

Journal article

Embargo date

9999-12-31