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Characterization of CVD-Mn barrier layers using X-ray absorption fine structure
Publication:
Characterization of CVD-Mn barrier layers using X-ray absorption fine structure
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Date
2011
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ablett, James
;
Wilson, Chris
;
Phuong, Nguyen Mai
;
Koike, Junichi
;
Tokei, Zsolt
;
Sterbinsky, George
;
Woicik, Joseph
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1927
since deposited on 2021-10-19
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Acq. date: 2026-02-25
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Statistics
Views
1927
since deposited on 2021-10-19
3
last month
Acq. date: 2026-02-25
Citations