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Characterization of CVD-Mn barrier layers using X-ray absorption fine structure

dc.contributor.authorAblett, James
dc.contributor.authorWilson, Chris
dc.contributor.authorPhuong, Nguyen Mai
dc.contributor.authorKoike, Junichi
dc.contributor.authorTokei, Zsolt
dc.contributor.authorSterbinsky, George
dc.contributor.authorWoicik, Joseph
dc.date.accessioned2021-10-19T12:28:17Z
dc.date.available2021-10-19T12:28:17Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18442
dc.sourceIIOimport
dc.titleCharacterization of CVD-Mn barrier layers using X-ray absorption fine structure
dc.typeOral presentation
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorTokei, Zsolt
dc.source.peerreviewno
dc.source.conferenceAdvanced Metallization Conference - ADMETA
dc.source.conferencedate13/09/2011
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


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