Authors

Adelmann, Christoph; Swerts, Johan; Conard, Thierry; Brijs, Bert; Franquet, Alexis; Hardy, An; Tielens, Hilde; Opsomer, Karl; Moussa, Alain; Van Bael, Marlies; Jurczak, Gosia; Kittl, Jorge; Van Elshocht, Sven

Conference

China Semiconductor Technology International Conference - CSTIC

Title

Atomic-layer deposition of lutetium aluminate thin films for non-volatile memory applications

Publication type

Proceedings paper