Ultra low dielectric constant materials for 22 nm technology node and beyond

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Authors
Baklanov, Mikhaïl; Smirnov, Evgeny; Zhao, Larry
Conference
Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 11
Title
Ultra low dielectric constant materials for 22 nm technology node and beyond
Publication type
Proceedings paper
Embargo date
9999-12-31
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