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TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM

dc.contributor.authorBarozzi, Mario
dc.contributor.authorIacob, E
dc.contributor.authorvan den Berg, J.A.
dc.contributor.authorReading, M.A.
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorTielens, Hilde
dc.contributor.authorBersani, M.
dc.date.accessioned2021-10-19T12:31:58Z
dc.date.available2021-10-19T12:31:58Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18532
dc.sourceIIOimport
dc.titleTiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM
dc.typeMeeting abstract
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorTielens, Hilde
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecPopovici, Mihaela Ioana::0000-0002-9838-1088
dc.source.peerreviewno
dc.source.conference18th International Conference on Secondary Ion Mass Spectrometry - SIMS XVIII
dc.source.conferencedate18/09/2011
dc.source.conferencelocationTrento Italy
imec.availabilityPublished - imec


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