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Influence of hydrogen gas on the synthesis and properties of hexagonal boron nitride nanowalls prepared by unbalanced RF magnetron sputtering
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Authors
BenMoussa, B.
;
Borschel, C.
;
D'Haen, Jan
;
Barjon, J.
;
Saitner, M.
;
Soltani, A.
;
Mortet, V.
;
Ronning, C.
;
D'Olieslaeger, Marc
;
Boyen, H.G.
;
Haenen, Ken
Conference
MRS Spring Meeting Symposium S: Plasma-Assisted Materials Processing and Synthesis
Title
Influence of hydrogen gas on the synthesis and properties of hexagonal boron nitride nanowalls prepared by unbalanced RF magnetron sputtering
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Oral presentation
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