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Influence of hydrogen gas on the synthesis and properties of hexagonal boron nitride nanowalls prepared by unbalanced RF magnetron sputtering

dc.contributor.authorBenMoussa, B.
dc.contributor.authorBorschel, C.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorBarjon, J.
dc.contributor.authorSaitner, M.
dc.contributor.authorSoltani, A.
dc.contributor.authorMortet, V.
dc.contributor.authorRonning, C.
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorBoyen, H.G.
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-19T12:33:28Z
dc.date.available2021-10-19T12:33:28Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18552
dc.sourceIIOimport
dc.titleInfluence of hydrogen gas on the synthesis and properties of hexagonal boron nitride nanowalls prepared by unbalanced RF magnetron sputtering
dc.typeOral presentation
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conferenceMRS Spring Meeting Symposium S: Plasma-Assisted Materials Processing and Synthesis
dc.source.conferencedate25/04/2011
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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