Authors

Bogdanowicz, Janusz; Clarysse, Trudo; Moussa, Alain; Mody, Jay; Eyben, Pierre; Vandervorst, Wilfried; Rosseel, Erik

Conference

Ion Implantation Technology 2010. 18th International Conference

Title

Non-destructive characterization of activated ion-implanted doping profiles based on photomodulated optical reflectance

Publication type

Proceedings paper