Authors

Bret, Tristan; Baralia, Gabriel; Baur, Christof; Budach, Michael; Hofmann, Thorsten; Edinger, Klaus; Magana, John; Jonckheere, Rik; Van Den Heuvel, Dieter

Conference

55th International conference on Electron, Ion and Photon Beam Technology and Nanofabrication - EIPBN

Title

EUV mask repair using a combination of focused-electron-beam-induced processing and vacuum Atomic Force Microscopy

Publication type

Oral presentation

Embargo date

9999-12-31