Uniaxial stress efficiency for different fin dimensions of triple-gate SOI MOSFETs

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Authors
Buhler, R.T.; Agopian, P.D.G.; Giacomini, R.; Simoen, Eddy; Claeys, Cor; Martino, J.A.
Conference
37th IEEE International SOI Conference
Title
Uniaxial stress efficiency for different fin dimensions of triple-gate SOI MOSFETs
Publication type
Proceedings paper
Embargo date
9999-12-31
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