Uniaxial stress efficiency for different fin dimensions of triple-gate SOI MOSFETs
dc.contributor.author | Buhler, R.T. | |
dc.contributor.author | Agopian, P.D.G. | |
dc.contributor.author | Giacomini, R. | |
dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | Claeys, Cor | |
dc.contributor.author | Martino, J.A. | |
dc.date.accessioned | 2021-10-19T12:40:42Z | |
dc.date.available | 2021-10-19T12:40:42Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18628 | |
dc.source | IIOimport | |
dc.title | Uniaxial stress efficiency for different fin dimensions of triple-gate SOI MOSFETs | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | 37th IEEE International SOI Conference | |
dc.source.conferencedate | 3/10/2011 | |
dc.source.conferencelocation | Tempe, AZ USA | |
imec.availability | Published - open access |