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3D features measurement using YieldStar, an angle resolved polarized scatterometer

dc.contributor.authorCharley, Anne-Laure
dc.contributor.authorLeray, Philippe
dc.contributor.authorD'have, Koen
dc.contributor.authorCheng, Shaunee
dc.contributor.authorHinnen, Paul
dc.contributor.authorLi, Fahong
dc.contributor.authorVanoppen, Peter
dc.contributor.authorDusa, Mircea
dc.date.accessioned2021-10-19T12:43:53Z
dc.date.available2021-10-19T12:43:53Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18654
dc.sourceIIOimport
dc.title3D features measurement using YieldStar, an angle resolved polarized scatterometer
dc.typeProceedings paper
dc.contributor.imecauthorCharley, Anne-Laure
dc.contributor.imecauthorLeray, Philippe
dc.contributor.imecauthorD'have, Koen
dc.contributor.imecauthorDusa, Mircea
dc.contributor.orcidimecD'have, Koen::0000-0002-5195-9241
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage79712E
dc.source.conferenceMetrology, Inspection, and Process Control XXV
dc.source.conferencedate27/02/2011
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 7971


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