Authors

Chiodarelli, Nicolo; Delabie, Annelies; Masahito, Sugiura; Kashiwagi, Yusaku; Richard, Olivier; Bender, Hugo; Cott, Daire; Heyns, Marc; De Gendt, Stefan; Groeseneken, Guido; Vereecken, Philippe

Conference

Carbon-Based Electronic Devices. Processing, Performance and Reliabilty

Title

ALD of Al2O3 for carbon nanotube vertical interconnect and its impact on the electrical properties

Publication type

Proceedings paper

Embargo date

9999-12-31