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ALD of Al2O3 for carbon nanotube vertical interconnect and its impact on the electrical properties

dc.contributor.authorChiodarelli, Nicolo
dc.contributor.authorDelabie, Annelies
dc.contributor.authorMasahito, Sugiura
dc.contributor.authorKashiwagi, Yusaku
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorCott, Daire
dc.contributor.authorHeyns, Marc
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorVereecken, Philippe
dc.date.accessioned2021-10-19T12:48:13Z
dc.date.available2021-10-19T12:48:13Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18684
dc.sourceIIOimport
dc.titleALD of Al2O3 for carbon nanotube vertical interconnect and its impact on the electrical properties
dc.typeProceedings paper
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpagemrsf10-1283-b10
dc.source.conferenceCarbon-Based Electronic Devices. Processing, Performance and Reliabilty
dc.source.conferencedate29/11/2010
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Proceedings; Vol. 1283


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