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Carbon nanotube interconnects: Electrical characterization of 150 nm CNT contacts with Cu damascene top contact

dc.contributor.authorChiodarelli, Nicolo
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorVereecke, Bart
dc.contributor.authorCott, Daire
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorVereecken, Philippe
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-19T12:48:43Z
dc.date.available2021-10-19T12:48:43Z
dc.date.issued2011-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18687
dc.sourceIIOimport
dc.titleCarbon nanotube interconnects: Electrical characterization of 150 nm CNT contacts with Cu damascene top contact
dc.typeProceedings paper
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorVereecke, Bart
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.source.peerreviewyes
dc.source.beginpage153
dc.source.endpage155
dc.source.conferenceIEEE International Interconnect Technology Conference and Materials for Advanced Metallization - IITC/MAM
dc.source.conferencedate8/05/2011
dc.source.conferencelocationDresden Germany
dc.identifier.urlhttp://www.his.com/~iitc/Program%20Draft%20-%20web-v7.pdf
imec.availabilityPublished - imec


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