Publication:

Advanced PBTI reliability with 0.69nm EOT GdHfO gate dielectric

Date

2011

Journal article

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Author(s)

;

Aoulaiche, Marc

;

Degraeve, Robin

;

;

Kauerauf, Thomas

;

Ragnarsson, Lars-Ake

;

Adelmann, Christoph

;

Van Elshocht, Sven

;

Hoffmann, Thomas Y.

;

Groeseneken, Guido

Journal

Solid-State Electronics

Metrics

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