Advanced PBTI reliability with 0.69nm EOT GdHfO gate dielectric

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Authors

Cho, Moon Ju; Aoulaiche, Marc; Degraeve, Robin; Kaczer, Ben; Kauerauf, Thomas; Ragnarsson, Lars-Ake; Adelmann, Christoph; Van Elshocht, Sven; Hoffmann, Thomas Y.; Groeseneken, Guido

ISSN

0038-1101

Issue

1

Journal

Solid-State Electronics

Volume

63

Title

Advanced PBTI reliability with 0.69nm EOT GdHfO gate dielectric

Publication type

Journal article

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