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Investigation of spatial and energetic trap distributions in 1 nm EOT SiO2/HfO2 by discharging-sweep mode amplitude charge pumping
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Authors
Chung, Eun-Ae
;
Nam, Kab-Jin
;
Kim, Young-Pil
;
Min, Ji-Young
;
Cho, Moon Ju
;
Hong, Hyungseok
;
Han, Jeong
;
Lee, Jae-Duk
;
Shin, Yu-Gyun
;
Choi, Siyoung
;
Kim, Sangsig
ISSN
1293-2558
Issue
6
Journal
Solid State Sciences
Volume
13
Title
Investigation of spatial and energetic trap distributions in 1 nm EOT SiO2/HfO2 by discharging-sweep mode amplitude charge pumping
Publication type
Journal article
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