Poly-silicon germanium thin-film package: study of structural features enabling CMOS-MEMS integration

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Authors
Claes, Gert
Supervisor
Celis, Jean-Pierre; Van Hoof, Chris
Title
Poly-silicon germanium thin-film package: study of structural features enabling CMOS-MEMS integration
Publication type
PHD thesis
Embargo date
9999-12-31
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