Authors
De Coster, Jeroen;
Lofrano, Melina;
Jansen, Roelof;
Rottenberg, Xavier;
Severi, Simone;
Borremans, Jonathan;
Van der Plas, Geert;
Donnay, Stephane;
Tilmans, Harrie;
De Wolf, Ingrid
Conference
16th International Conference on Solid-State sensors, Actuators and Microsystems - Transducers
Title
A novel test method for simultaneous measurement of thermal conductivity, CTE, residual stress and Young's modulus of suspended thin films using a laser Doppler vibrometer
Publication type
Proceedings paper
