| dc.contributor.author | De Coster, Jeroen | |
| dc.contributor.author | Lofrano, Melina | |
| dc.contributor.author | Jansen, Roelof | |
| dc.contributor.author | Rottenberg, Xavier | |
| dc.contributor.author | Severi, Simone | |
| dc.contributor.author | Borremans, Jonathan | |
| dc.contributor.author | Van der Plas, Geert | |
| dc.contributor.author | Donnay, Stephane | |
| dc.contributor.author | Tilmans, Harrie | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.date.accessioned | 2021-10-19T13:03:48Z | |
| dc.date.available | 2021-10-19T13:03:48Z | |
| dc.date.issued | 2011 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18779 | |
| dc.source | IIOimport | |
| dc.title | A novel test method for simultaneous measurement of thermal conductivity, CTE, residual stress and Young's modulus of suspended thin films using a laser Doppler vibrometer | |
| dc.type | Proceedings paper | |
| dc.contributor.imecauthor | De Coster, Jeroen | |
| dc.contributor.imecauthor | Lofrano, Melina | |
| dc.contributor.imecauthor | Jansen, Roelof | |
| dc.contributor.imecauthor | Rottenberg, Xavier | |
| dc.contributor.imecauthor | Severi, Simone | |
| dc.contributor.imecauthor | Van der Plas, Geert | |
| dc.contributor.imecauthor | Donnay, Stephane | |
| dc.contributor.imecauthor | Tilmans, Harrie | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | Jansen, Roelof::0000-0001-6685-4699 | |
| dc.contributor.orcidimec | Van der Plas, Geert::0000-0002-4975-6672 | |
| dc.contributor.orcidimec | Donnay, Stephane::0000-0003-2489-4793 | |
| dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.source.peerreview | yes | |
| dc.source.conference | 16th International Conference on Solid-State sensors, Actuators and Microsystems - Transducers | |
| dc.source.conferencedate | 5/06/2011 | |
| dc.source.conferencelocation | Beijing China | |
| imec.availability | Published - imec | |
