Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
SEM proximity effect for poly gate patterns
Publication:
SEM proximity effect for poly gate patterns
Copy permalink
Date
1997
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
1850.pdf
516.09 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Finders, Jo
;
Potoms, Goedele
;
Ronse, Kurt
;
Van den hove, Luc
;
Van Driessche, Veerle
;
Tzviatkov, Plamen
;
Bruggeman, B.
;
Caligiore, A.
Journal
Microlithography World
Abstract
Description
Statistics
Views
1916
since deposited on 2021-09-30
1
last week
Acq. date: 2026-02-26
Citations
Statistics
Views
1916
since deposited on 2021-09-30
1
last week
Acq. date: 2026-02-26
Citations