Authors

Delabie, Annelies; Sioncke, Sonja; Rip, Jens; Van Elshocht, Sven; Caymax, Matty; Pourtois, Geoffrey; Pierloot, Kristine

ISSN

1932-7447

Issue

35

Journal

Journal of Physical Chemistry C

Volume

115

Title

Mechanisms for the trimethylaluminum reaction in aluminum oxide atomic layer deposition on sulfur passivated germanium

Publication type

Journal article