dc.contributor.author | Detalle, Mikael | |
dc.contributor.author | Dekkers, Harold | |
dc.contributor.author | Potoms, Goedele | |
dc.contributor.author | Phommahaxay, Alain | |
dc.contributor.author | Sabuncuoglu Tezcan, Deniz | |
dc.contributor.author | Soussan, Philippe | |
dc.contributor.author | Beyer, Gerald | |
dc.date.accessioned | 2021-10-19T13:14:28Z | |
dc.date.available | 2021-10-19T13:14:28Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18833 | |
dc.source | IIOimport | |
dc.title | Improvement of thermal stability in high density Ta2O5 3D capacitor by additional thin SiO2 layer | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Detalle, Mikael | |
dc.contributor.imecauthor | Dekkers, Harold | |
dc.contributor.imecauthor | Potoms, Goedele | |
dc.contributor.imecauthor | Phommahaxay, Alain | |
dc.contributor.imecauthor | Sabuncuoglu Tezcan, Deniz | |
dc.contributor.imecauthor | Soussan, Philippe | |
dc.contributor.imecauthor | Beyer, Gerald | |
dc.contributor.orcidimec | Dekkers, Harold::0000-0003-4778-5709 | |
dc.contributor.orcidimec | Sabuncuoglu Tezcan, Deniz::0000-0002-9237-7862 | |
dc.contributor.orcidimec | Soussan, Philippe::0000-0002-1347-6978 | |
dc.source.peerreview | no | |
dc.source.conference | International Conference on Solid State Devices and Materials - SSDM | |
dc.source.conferencedate | 28/09/2011 | |
dc.source.conferencelocation | Nagoya Japan | |
imec.availability | Published - imec | |