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Improvement of thermal stability in high density Ta2O5 3D capacitor by additional thin SiO2 layer
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1891 since deposited on 2021-10-19
1last month
Acq. date: 2026-08-24
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Statistics
Views
1891 since deposited on 2021-10-19
1last month
Acq. date: 2026-08-24
Citations