Publication:
Improvement of thermal stability in high density Ta2O5 3D capacitor by additional thin SiO2 layer
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1893 since deposited on 2021-10-19
2last month
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Acq. date: 2026-09-19
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Statistics
Views
1893 since deposited on 2021-10-19
2last month
1last week
Acq. date: 2026-09-19
Citations