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Improvement of thermal stability in high density Ta2O5 3D capacitor by additional thin SiO2 layer

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1895 since deposited on 2021-10-19
3last month
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Acq. date: 2026-10-13

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Views

1895 since deposited on 2021-10-19
3last month
1last week
Acq. date: 2026-10-13

Citations