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Improvement of thermal stability in high density Ta2O5 3D capacitor by additional thin SiO2 layer
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Improvement of thermal stability in high density Ta2O5 3D capacitor by additional thin SiO2 layer
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Date
2011
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Detalle, Mikael
;
Dekkers, Harold
;
Potoms, Goedele
;
Phommahaxay, Alain
;
Sabuncuoglu Tezcan, Deniz
;
Soussan, Philippe
;
Beyer, Gerald
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1890
since deposited on 2021-10-19
Acq. date: 2025-12-15
Citations
Metrics
Views
1890
since deposited on 2021-10-19
Acq. date: 2025-12-15
Citations