Publication:

Improvement of thermal stability in high density Ta2O5 3D capacitor by additional thin SiO2 layer

Date

2011
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorDetalle, Mikael
dc.contributor.authorDekkers, Harold
dc.contributor.authorPotoms, Goedele
dc.contributor.authorPhommahaxay, Alain
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorSoussan, Philippe
dc.contributor.authorBeyer, Gerald
dc.contributor.imecauthorDetalle, Mikael
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthorPotoms, Goedele
dc.contributor.imecauthorPhommahaxay, Alain
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.date.accessioned2021-10-19T13:14:28Z
dc.date.available2021-10-19T13:14:28Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18833
dc.source.conferenceInternational Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate28/09/2011
dc.source.conferencelocationNagoya Japan
dc.title

Improvement of thermal stability in high density Ta2O5 3D capacitor by additional thin SiO2 layer

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions