Poly-open and metal CMP steps in RMG processing on planar and 3D architecture devices

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Authors
Devriendt, Katia; Kellens, Kristof; Veloso, Anabela; Athimulam, Raja; Horiguchi, Naoto; Leunissen, Peter
Conference
International Conference on Planarization technology - ICPT
Title
Poly-open and metal CMP steps in RMG processing on planar and 3D architecture devices
Publication type
Proceedings paper
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