Publication:
Poly-open and metal CMP steps in RMG processing on planar and 3D architecture devices
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1990 since deposited on 2021-10-19
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Acq. date: 2026-03-17
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Statistics
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1990 since deposited on 2021-10-19
2last month
2last week
Acq. date: 2026-03-17
Citations