On the efficiency of stress techniques in gate-last n-type bulk finfets

Thumbnail
Metadata
Show full item record
Authors
Eneman, Geert; Collaert, Nadine; Veloso, Anabela; De Keersgieter, An; De Meyer, Kristin; Hoffmann, Thomas Y.
Conference
41st European Solid-State Device Research Conference - ESSDERC
Title
On the efficiency of stress techniques in gate-last n-type bulk finfets
Publication type
Proceedings paper
Collections