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On the impact of the Si passivation layer thickness on the NBTI of nanoscaled Si0.45Ge0.55 pMOSFETs
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Authors
Franco, Jacopo
;
Kaczer, Ben
;
Toledano Luque, Maria
;
Roussel, Philippe
;
Hehenberger, Philip
;
Grasser, Tibor
;
Mitard, Jerome
;
Eneman, Geert
;
Witters, Liesbeth
;
Hoffmann, Thomas Y.
;
Groeseneken, Guido
ISSN
0167-9317
Issue
7
Journal
Microelectronic Engineering
Volume
88
Title
On the impact of the Si passivation layer thickness on the NBTI of nanoscaled Si0.45Ge0.55 pMOSFETs
Publication type
Journal article
Embargo date
9999-12-31
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