ToF-SIMS and G-SIMS analyses of organic thin films for microelectronic applications

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Authors
Franquet, Alexis; Conard, Thierry; Vandervorst, Wilfried
Conference
15th International Conference on Thin Films - ICTF
Title
ToF-SIMS and G-SIMS analyses of organic thin films for microelectronic applications
Publication type
Meeting abstract
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