Show simple item record

ToF-SIMS and G-SIMS analyses of organic thin films for microelectronic applications

dc.contributor.authorFranquet, Alexis
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-19T13:37:26Z
dc.date.available2021-10-19T13:37:26Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18930
dc.sourceIIOimport
dc.titleToF-SIMS and G-SIMS analyses of organic thin films for microelectronic applications
dc.typeMeeting abstract
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.conference15th International Conference on Thin Films - ICTF
dc.source.conferencedate8/11/2011
dc.source.conferencelocationKyoto Japan
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record