dc.contributor.author | Freed, Regina | |
dc.contributor.author | Sun, Jeff | |
dc.contributor.author | Brodie, Alan D. | |
dc.contributor.author | Petric, Paul | |
dc.contributor.author | McCord, Marc A. | |
dc.contributor.author | Ronse, Kurt | |
dc.contributor.author | Haspeslagh, Luc | |
dc.contributor.author | Vereecke, Bart | |
dc.date.accessioned | 2021-10-19T13:38:13Z | |
dc.date.available | 2021-10-19T13:38:13Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18933 | |
dc.source | IIOimport | |
dc.title | Demonstration of lithography patterns using reflective e-beam direct write | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Ronse, Kurt | |
dc.contributor.imecauthor | Haspeslagh, Luc | |
dc.contributor.imecauthor | Vereecke, Bart | |
dc.contributor.orcidimec | Ronse, Kurt::0000-0003-0803-4267 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 79701T | |
dc.source.conference | Alternative Lithographic Technologies III | |
dc.source.conferencedate | 27/02/2011 | |
dc.source.conferencelocation | San Jose, CA USA | |
imec.availability | Published - open access | |
imec.internalnotes | Proceedings SPIE; Vol. 7970 | |