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Relationship between structural changes, hydrogen content and annealing in stacks of ultrathin Si/Ge amorphous layers
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Authors
Frigeri, C.
;
Serenyi, M.
;
Nguyen, Q.K.
;
Csik, A.
;
Riesz, F.
;
Erdelyi, Z.
;
Nasi, L.
;
Beke, D.L.
;
Boyen, Hans-Gerd
ISSN
1931-7573
Journal
Nanoscale Research Letters
Volume
6
Title
Relationship between structural changes, hydrogen content and annealing in stacks of ultrathin Si/Ge amorphous layers
Publication type
Journal article
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