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Optimized microelens shape by reflow of multiple layers of photoresist: experimental data and lens shape calculations

dc.contributor.authorGenoe, Jan
dc.contributor.authorHeremans, Paul
dc.contributor.authorKuijk, Maarten
dc.contributor.authorVounckx, Roger
dc.contributor.authorBorghs, Gustaaf
dc.date.accessioned2021-09-30T08:18:50Z
dc.date.available2021-09-30T08:18:50Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1893
dc.sourceIIOimport
dc.titleOptimized microelens shape by reflow of multiple layers of photoresist: experimental data and lens shape calculations
dc.typeOral presentation
dc.contributor.imecauthorGenoe, Jan
dc.contributor.imecauthorHeremans, Paul
dc.contributor.imecauthorVounckx, Roger
dc.contributor.imecauthorBorghs, Gustaaf
dc.contributor.orcidimecGenoe, Jan::0000-0002-4019-5979
dc.source.peerreviewno
dc.source.conferenceMicrolens Arrays Conference, EOS Topical Meeting; May 15-16 1997; London, UK.
dc.source.conferencelocation
imec.availabilityPublished - imec


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