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Optimized microelens shape by reflow of multiple layers of photoresist: experimental data and lens shape calculations
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Authors
Genoe, Jan
;
Heremans, Paul
;
Kuijk, Maarten
;
Vounckx, Roger
;
Borghs, Gustaaf
Conference
Microlens Arrays Conference, EOS Topical Meeting; May 15-16 1997; London, UK.
Title
Optimized microelens shape by reflow of multiple layers of photoresist: experimental data and lens shape calculations
Publication type
Oral presentation
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