Optimized microelens shape by reflow of multiple layers of photoresist: experimental data and lens shape calculations

dc.contributor.author	Genoe, Jan
dc.contributor.author	Heremans, Paul
dc.contributor.author	Kuijk, Maarten
dc.contributor.author	Vounckx, Roger
dc.contributor.author	Borghs, Gustaaf
dc.contributor.imecauthor	Genoe, Jan
dc.contributor.imecauthor	Heremans, Paul
dc.contributor.imecauthor	Vounckx, Roger
dc.contributor.imecauthor	Borghs, Gustaaf
dc.contributor.orcidimec	Genoe, Jan::0000-0002-4019-5979
dc.date.accessioned	2021-09-30T08:18:50Z
dc.date.available	2021-09-30T08:18:50Z
dc.date.issued	1997
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/1893
dc.source.conference	Microlens Arrays Conference, EOS Topical Meeting; May 15-16 1997; London, UK.
dc.source.conferencelocation
dc.title	Optimized microelens shape by reflow of multiple layers of photoresist: experimental data and lens shape calculations
dc.type	Oral presentation
dspace.entity.type	Publication
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