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Optimized microelens shape by reflow of multiple layers of photoresist: experimental data and lens shape calculations
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Optimized microelens shape by reflow of multiple layers of photoresist: experimental data and lens shape calculations
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Date
1997
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Genoe, Jan
;
Heremans, Paul
;
Kuijk, Maarten
;
Vounckx, Roger
;
Borghs, Gustaaf
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1878
since deposited on 2021-09-30
Acq. date: 2026-02-24
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Views
1878
since deposited on 2021-09-30
Acq. date: 2026-02-24
Citations