Recent findings in electrical behavior of CMOS high-K dielectric/metal gate stacks

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Authors
Ghibaudo, Gerard; Coignus, Jean; Charbonnier, Matthieu; Mitard, Jerome; Leroux, Charles; Garros, Xavier; Clerc, Raphael; Reimbold, Gilles
Conference
Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 11
Title
Recent findings in electrical behavior of CMOS high-K dielectric/metal gate stacks
Publication type
Proceedings paper
Embargo date
9999-12-31
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