Publication:

EUV resist performance update on ADT and NXE:3100 scanner

Date

2011

Proceedings Paper

Simple item page Full metadata Statistics

Files

22900.pdf 10.07 MB

Author(s)

Goethals, Mieke

;

Niroomand, Ardavan

;

Hosokawa, Kohei

;

Van Roey, Frieda

;

Pollentier, Ivan

;

Van Den Heuvel, Dieter

Metrics

1882 since deposited on 2021-10-19

Acq. date: 2025-12-12