Authors

Gramenova, Emilia; Jansen, Philippe; Simoen, Eddy; Vanhellemont, Jan; Dupas, Luc; Deferm, Ludo

Conference

Crystalline Defects and Contamination Control: Their Impact and Control in Device Manufacturing II

Title

Impact of processing parameters on leakage current and defect behavior of n+p silicon junction diodes

Publication type

Proceedings paper

Embargo date

9999-12-31