Authors

Armigliato, A.; Balboni, R.; Corticelli, F.; Frabboni, S.; Malvezzi, F.; Vanhellemont, Jan

Conference

1st International Conference on Materials for Microelectronics; October 17-19, 1994; Barcelona, Spain.

Title

Analytical Electron Microscopy of Si1-xGex/Si Heterostructures and Local Isolation Structures

Publication type

Oral presentation